| 000 | 00577nam a2200253Ia 4500 | ||
|---|---|---|---|
| 100 | _aMADOU MARC J | ||
| 020 | _a0-8493-0826-7 | ||
| 250 | _a2nd | ||
| 650 | _aMicrofabrication | ||
| 365 | _cRS | ||
| 365 | _d1 | ||
| 942 | _cENGBK | ||
| 654 | _aFundamentals | ||
| 654 | _aof | ||
| 654 | _aMicrofabrication | ||
| 654 | _aThe | ||
| 654 | _aScience | ||
| 654 | _aof | ||
| 654 | _aminiaturization | ||
| 654 | _aMicrofabrication | ||
| 245 | _aFundamentals of Microfabrication The Science of miniaturization | ||
| 260 |
_bCRC Press _c2002 _aNew Delhi |
||
| 300 | _a723P | ||
| 999 |
_c4789 _d4789 |
||