| 000 | 00584nam a22002177a 4500 | ||
|---|---|---|---|
| 005 | 20250102114815.0 | ||
| 008 | 241214b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9780470083017 | ||
| 040 | _cMVJCE | ||
| 082 | _a621.381 5 HSU 2;1 | ||
| 100 |
_aHsu, Tai-Ran _91228 |
||
| 100 | _91228 | ||
| 245 |
_aMems and microsystems: _bdesign, manufacture, and nanoscale engineering |
||
| 250 | _a2nd ed. | ||
| 260 |
_aNew Jersey _bJohn Wiley & sons _c2008 |
||
| 300 | _axxv+5550p. | ||
| 654 | _aMems | ||
| 654 | _aMicrosystems | ||
| 654 | _aNanoscale engineering | ||
| 942 |
_2ddc _cENGBK |
||
| 999 |
_c42429 _d42429 |
||