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100 _aHSU TAI RAN
020 _a0-07-048709-3
650 _aDesign and Manufacture
365 _cRS
365 _d1
942 _cENGBK
654 _aMems
654 _aand
654 _aMicro
654 _aSystems
654 _aDesign
654 _aand
654 _aManufacture
654 _aDesign and Manufacture
245 _aMEMS and Microsystems Design and Manufacture
260 _bTMH Pub Co Ltd
_c2002
_aNew Delhi
300 _aXII+436P
999 _c28047
_d28047