TY  - BOOK
AU  - MADOU MARC J
TI  - Fundamentals of Microfabrication The Science of miniaturization
SN  - 0-8493-0826-7
PY  - 2002///
CY  - New Delhi
PB  - CRC Press
KW  - Microfabrication
KW  - Fundamentals
KW  - of
KW  - The
KW  - Science
KW  - miniaturization
ER  -