TY  - BOOK
AU  - Hsu, Tai-Ran
AU  - 
TI  - Mems and microsystems: design, manufacture, and nanoscale engineering
SN  - 9780470083017
U1  - 621.381 5 HSU 2;2 
PY  - 2008///
CY  - New Jersey
PB  - John Wiley & sons
KW  - Mems
KW  - Microsystems
KW  - Nanoscale engineering
ER  -