Hsu, Tai-Ran <br/><br/>
Mems and microsystems:  design, manufacture, and nanoscale engineering 

 - 2nd ed. 
 - New Jersey  John Wiley & sons  2008 
 - xxv+5550p. 
<br/><br/><label>ISBN: </label>9780470083017 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>Mems<br/>Microsystems<br/>Nanoscale engineering
<br/><br/><label>Dewey Class. No.: </label>621.381 5 HSU 2;2