TY  - BOOK
AU  - HSU TAI RAN
TI  - MEMS and Microsystems Design and Manufacture
SN  - 0-07-048709-3
PY  - 2002///
CY  - New Delhi
PB  - TMH Pub Co Ltd
KW  - Design and Manufacture
KW  - Mems
KW  - and
KW  - Micro
KW  - Systems
KW  - Design
KW  - Manufacture
ER  -