TY  - BOOK
AU  - CAMPBELL STEPHEN A
TI  - The Science and Engineering of Microelectronic Fabrication
SN  - 0-19-513605-5
PY  - 2001///
CY  - New York
PB  - Oxford University Press
KW  - Microelectronic Fabrication
KW  - The
KW  - Science
KW  - and
KW  - Engineering
KW  - of
KW  - Microelectronic
KW  - Fabrication
ER  -