CAMPBELL STEPHEN A <br/><br/>
The Science and Engineering of Microelectronic Fabrication 

 - 2nd 
 - New York  Oxford University Press  2001 
 - XIV+603 PP 
<br/><br/><label>ISBN: </label>0-19-513605-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronic Fabrication
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>The<br/>Science<br/>and<br/>Engineering<br/>of<br/>Microelectronic<br/>Fabrication<br/>Microelectronic Fabrication