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Hsu, Tai-Ran

Mems and microsystems: design, manufacture, and nanoscale engineering - 2nd ed. - New Jersey John Wiley & sons 2008 - xxv+5550p.

ISBN: 9780470083017

Subjects--Facted Index Terms:
Mems
Microsystems
Nanoscale engineering

Dewey Class. No.: 621.381 5 HSU 2;1

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